Invention Application
US20170028591A1 MOLD, METHOD FOR PRODUCING MOLD, ANTI-REFLECTION FILM AND METHOD FOR PRODUCING ANTI-REFLECTION FILM 审中-公开
模具,用于生产模具的方法,防反射膜和用于生产抗反射膜的方法

MOLD, METHOD FOR PRODUCING MOLD, ANTI-REFLECTION FILM AND METHOD FOR PRODUCING ANTI-REFLECTION FILM
Abstract:
A manufacturing method of a mold includes the steps of: providing an aluminum base in the shape of a hollow cylinder which is made of a Al—Mg—Si based aluminum alloy, the aluminum base being mechanically mirror-finished; performing a frosting treatment on a surface of the aluminum base with an aqueous solution which contains a salt of hydrogen fluoride and ammonium; thereafter, forming an inorganic material layer on the surface of the aluminum base and forming an aluminum film on the inorganic material layer, thereby forming a mold base; and alternately repeating anodization and etching on a surface of the aluminum film of the mold base, thereby forming an inverted moth-eye structure which has a plurality of micro recessed portions.
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