Invention Application
- Patent Title: FERROELECTRIC MEMORY DEVICE AND FABRICATION METHOD THEREOF
- Patent Title (中): 电磁存储器件及其制造方法
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Application No.: US15230289Application Date: 2016-08-05
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Publication No.: US20170040331A1Publication Date: 2017-02-09
- Inventor: Jan Van Houdt , Voon Yew Thean
- Applicant: IMEC VZW
- Priority: EP15180192.5 20150807
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L29/66 ; H01L29/51 ; H01L29/78

Abstract:
The disclosed technology generally relates to semiconductor devices, and more particularly to a non-volatile ferroelectric memory device and to methods of fabricating the same. In one aspect, a non-volatile memory device includes a high dielectric constant layer (high-k) layer or a metal layer on a semiconductor substrate. The non-volatile memory device additionally includes a two-dimensional (2D) semiconductor channel layer interposed between the high-k layer or metal layer and a ferroelectric layer. The non-volatile memory device additionally includes a metal gate layer on the ferroelectric layer, and further includes a source region and a drain region each electrically coupled to the 2D semiconductor channel layer.
Public/Granted literature
- US10211312B2 Ferroelectric memory device and fabrication method thereof Public/Granted day:2019-02-19
Information query
IPC分类: