Invention Application
- Patent Title: TECHNIQUES FOR LOW TEMPERATURE DIRECT GRAPHENE GROWTH ON GLASS
- Patent Title (中): 玻璃上低温直接石墨生长的技术
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Application No.: US15172511Application Date: 2016-06-03
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Publication No.: US20170051399A1Publication Date: 2017-02-23
- Inventor: Vijayen S. VEERASAMY
- Applicant: Guardian Industries Corp.
- Main IPC: C23C14/48
- IPC: C23C14/48 ; C23C16/56 ; C23C16/06 ; C23C14/22 ; C23C16/50 ; C23C16/24

Abstract:
Certain example embodiments relate to methods for low temperature direct graphene growth on glass, and/or associated articles/devices. In certain example embodiments, a glass substrate has a layer including Ni formed thereon. The layer including Ni has a stress pre-engineered through the implantation of He therein. It also may be preconditioned via annealing and/or the like. A remote plasma-assisted chemical vapor deposition technique is used to form graphene both above and below the Ni-inclusive film. The Ni-inclusive film and the top graphene may be removed via tape and/or the like, leaving graphene on the substrate. Optionally, a silicon-inclusive layer may be formed between the Ni-inclusive layer and the substrate. Products including such articles, and/or methods of making the same, also are contemplated.
Public/Granted literature
- US10145005B2 Techniques for low temperature direct graphene growth on glass Public/Granted day:2018-12-04
Information query
IPC分类: