Invention Application
- Patent Title: LATERALLY DIFFUSED METAL OXIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
- Patent Title (中): 侧向扩散金属氧化物半导体器件及其制造方法
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Application No.: US15119868Application Date: 2015-05-04
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Publication No.: US20170054018A1Publication Date: 2017-02-23
- Inventor: Guangsheng ZHANG , Sen ZHANG
- Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.
- Priority: CN201410185331.7 20140504
- International Application: PCT/CN2015/078216 WO 20150504
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/06

Abstract:
A laterally diffused metal oxide semiconductor device includes: a substrate (10); a buried layer region (32) in the substrate; a well region (34) on the buried layer region (32); a gate region on the well region; a source region (41) and a drain region (43) which are located at two sides of the gate region; and a super junction structure. The source region (41) is located in the well region (34); the drain region (34) is located in the super junction structure; the gate region comprises a gate oxide layer and a gate electrode on the gate oxide layer; and the super junction structure comprises a plurality of N-columns and P-columns, wherein the N-columns and the P-columns are alternately arranged in a direction which is horizontal and is perpendicular to the direction of a connecting line between the source region and the drain region, each N-column comprises a top-layer N-region (23) and a bottom-layer N-region which are butted vertically, and each P-column comprises a top-layer P-region (24) and a bottom-layer P-region which are butted vertically.
Public/Granted literature
- US09837532B2 Laterally diffused metal oxide semiconductor device and manufacturing method therefor Public/Granted day:2017-12-05
Information query
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