Invention Application
US20170054018A1 LATERALLY DIFFUSED METAL OXIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR 有权
侧向扩散金属氧化物半导体器件及其制造方法

  • Patent Title: LATERALLY DIFFUSED METAL OXIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
  • Patent Title (中): 侧向扩散金属氧化物半导体器件及其制造方法
  • Application No.: US15119868
    Application Date: 2015-05-04
  • Publication No.: US20170054018A1
    Publication Date: 2017-02-23
  • Inventor: Guangsheng ZHANGSen ZHANG
  • Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.
  • Priority: CN201410185331.7 20140504
  • International Application: PCT/CN2015/078216 WO 20150504
  • Main IPC: H01L29/78
  • IPC: H01L29/78 H01L29/66 H01L29/06
LATERALLY DIFFUSED METAL OXIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
Abstract:
A laterally diffused metal oxide semiconductor device includes: a substrate (10); a buried layer region (32) in the substrate; a well region (34) on the buried layer region (32); a gate region on the well region; a source region (41) and a drain region (43) which are located at two sides of the gate region; and a super junction structure. The source region (41) is located in the well region (34); the drain region (34) is located in the super junction structure; the gate region comprises a gate oxide layer and a gate electrode on the gate oxide layer; and the super junction structure comprises a plurality of N-columns and P-columns, wherein the N-columns and the P-columns are alternately arranged in a direction which is horizontal and is perpendicular to the direction of a connecting line between the source region and the drain region, each N-column comprises a top-layer N-region (23) and a bottom-layer N-region which are butted vertically, and each P-column comprises a top-layer P-region (24) and a bottom-layer P-region which are butted vertically.
Information query
IPC分类:
H 电学
H01 基本电气元件
H01L 半导体器件;其他类目中不包括的电固体器件(使用半导体器件的测量入G01;一般电阻器入H01C;磁体、电感器、变压器入H01F;一般电容器入H01G;电解型器件入H01G9/00;电池组、蓄电池入H01M;波导管、谐振器或波导型线路入H01P;线路连接器、汇流器入H01R;受激发射器件入H01S;机电谐振器入H03H;扬声器、送话器、留声机拾音器或类似的声机电传感器入H04R;一般电光源入H05B;印刷电路、混合电路、电设备的外壳或结构零部件、电气元件的组件的制造入H05K;在具有特殊应用的电路中使用的半导体器件见应用相关的小类)
H01L29/00 专门适用于整流、放大、振荡或切换,并具有至少一个电位跃变势垒或表面势垒的半导体器件;具有至少一个电位跃变势垒或表面势垒,例如PN结耗尽层或载流子集结层的电容器或电阻器;半导体本体或其电极的零部件(H01L31/00至H01L47/00,H01L51/05优先;除半导体或其电极之外的零部件入H01L23/00;由在一个共用衬底内或其上形成的多个固态组件组成的器件入H01L27/00)
H01L29/66 .按半导体器件的类型区分的
H01L29/68 ..只能通过对一个不通有待整流、放大或切换的电流的电极供给电流或施加电位方可进行控制的(H01L29/96优先)
H01L29/76 ...单极器件
H01L29/772 ....场效应晶体管
H01L29/78 .....由绝缘栅产生场效应的
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