Invention Application
US20170059774A1 INTEGRATED CIRCUIT INCLUDING AN ACTIVE DEVICE FOR CONFINEMENT OF A LIGHT FLUX
审中-公开
集成电路,包括用于限制光通量的活动设备
- Patent Title: INTEGRATED CIRCUIT INCLUDING AN ACTIVE DEVICE FOR CONFINEMENT OF A LIGHT FLUX
- Patent Title (中): 集成电路,包括用于限制光通量的活动设备
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Application No.: US15051904Application Date: 2016-02-24
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Publication No.: US20170059774A1Publication Date: 2017-03-02
- Inventor: Charles Baudot
- Applicant: STMicroelectronics (Crolles 2) SAS
- Applicant Address: FR Crolles
- Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee Address: FR Crolles
- Priority: FR1557883 20150824
- Main IPC: G02B6/122
- IPC: G02B6/122 ; G02B6/12

Abstract:
An integrated circuit includes an active device for confinement of a light flux that is formed in a semiconducting substrate. A confinement rib is separated from two doped zones by two trenches. Each doped zone includes a contacting zone on an upper face. Each trench widens from a bottom wall towards the upper face of the corresponding doped zone. The widening trenches present a sidewall having a tiered profile between the trench and the doped zone. An opposite sidewall presents a straight profile.
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