Invention Application
US20170059774A1 INTEGRATED CIRCUIT INCLUDING AN ACTIVE DEVICE FOR CONFINEMENT OF A LIGHT FLUX 审中-公开
集成电路,包括用于限制光通量的活动设备

INTEGRATED CIRCUIT INCLUDING AN ACTIVE DEVICE FOR CONFINEMENT OF A LIGHT FLUX
Abstract:
An integrated circuit includes an active device for confinement of a light flux that is formed in a semiconducting substrate. A confinement rib is separated from two doped zones by two trenches. Each doped zone includes a contacting zone on an upper face. Each trench widens from a bottom wall towards the upper face of the corresponding doped zone. The widening trenches present a sidewall having a tiered profile between the trench and the doped zone. An opposite sidewall presents a straight profile.
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