Invention Application
US20170060292A1 Methods for Forming a Patterned Structure in a Sensor 有权
在传感器中形成图形结构的方法

Methods for Forming a Patterned Structure in a Sensor
Abstract:
A sensor includes a patterned compliant layer positioned between two substrates. Each substrate can include one or more conductive electrodes, with each electrode of one substrate paired with a respective electrode of the other substrate. Each pair of conductive electrodes forms a capacitor. Several methods are disclosed that can be used to produce the patterned compliant layer.
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