发明申请
- 专利标题: SYMMETRIC TUNNEL FIELD EFFECT TRANSISTOR
- 专利标题(中): 对称隧道场效应晶体管
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申请号: US15084144申请日: 2016-03-29
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公开(公告)号: US20170062594A1公开(公告)日: 2017-03-02
- 发明人: Mohit BAJAJ , Suresh GUNDAPANENI , Aniruddha KONAR , Narasimha R. Mavilla , Kota V.R.M. MURALI , Edward J. NOWAK
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 主分类号: H01L29/66
- IPC分类号: H01L29/66
摘要:
The present disclosure relates to semiconductor structures and, more particularly, to a symmetric tunnel field effect transistor and methods of manufacture. The structure includes a gate structure including a source region and a drain region both of which comprise a doped VO2 region.
公开/授权文献
- US09876084B2 Symmetric tunnel field effect transistor 公开/授权日:2018-01-23
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