Invention Application
- Patent Title: VIA FORMATION FOR CROSS-POINT MEMORY
- Patent Title (中): 通过形成跨点记忆
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Application No.: US15280238Application Date: 2016-09-29
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Publication No.: US20170069375A1Publication Date: 2017-03-09
- Inventor: Stephen Tang
- Applicant: Micron Technology, Inc.
- Main IPC: G11C13/00
- IPC: G11C13/00 ; H01L23/528 ; H01L27/24 ; H01L45/00

Abstract:
Embodiments disclosed herein may relate to electrically conductive vias in cross-point memory array devices. In an embodiment, the vias may be formed using a lithographic operation also utilized to form electrically conductive lines in a first electrode layer of the cross-point memory array device.
Public/Granted literature
- US10311947B2 Via formation for cross-point memory Public/Granted day:2019-06-04
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