Invention Application
US20170069758A1 VERTICAL NON-PLANAR SEMICONDUCTOR DEVICE FOR SYSTEM-ON-CHIP (SOC) APPLICATIONS
审中-公开
用于片上系统(SOC)应用的垂直非平面半导体器件
- Patent Title: VERTICAL NON-PLANAR SEMICONDUCTOR DEVICE FOR SYSTEM-ON-CHIP (SOC) APPLICATIONS
- Patent Title (中): 用于片上系统(SOC)应用的垂直非平面半导体器件
-
Application No.: US15353631Application Date: 2016-11-16
-
Publication No.: US20170069758A1Publication Date: 2017-03-09
- Inventor: Chia-Hong Jan , Walid M. Hafez , Curtis Tsai , Jeng-Ya D. Yeh , Joodong Park
- Applicant: Intel Corporation
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/06

Abstract:
Vertical non-planar semiconductor devices for system-on-chip (SoC) applications and methods of fabricating vertical non-planar semiconductor devices are described. For example, a semiconductor device includes a semiconductor fin disposed above a substrate, the semiconductor fin having a recessed portion and an uppermost portion. A source region is disposed in the recessed portion of the semiconductor fin. A drain region is disposed in the uppermost portion of the semiconductor fin. A gate electrode is disposed over the uppermost portion of the semiconductor fin, between the source and drain regions.
Public/Granted literature
- US10263112B2 Vertical non-planar semiconductor device for system-on-chip (SoC) applications Public/Granted day:2019-04-16
Information query
IPC分类: