Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Patent Title (中): 半导体器件及其制造方法
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Application No.: US15356976Application Date: 2016-11-21
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Publication No.: US20170069765A1Publication Date: 2017-03-09
- Inventor: Shunpei YAMAZAKI , Satoshi SHINOHARA
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Priority: JP2011-152099 20110708
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/24 ; H01L29/04

Abstract:
Provided are a transistor which has electrical characteristics requisite for its purpose and uses an oxide semiconductor layer and a semiconductor device including the transistor. In the bottom-gate transistor in which at least a gate electrode layer, a gate insulating film, and the semiconductor layer are stacked in this order, an oxide semiconductor stacked layer including at least two oxide semiconductor layers whose energy gaps are different from each other is used as the semiconductor layer. Oxygen and/or a dopant may be added to the oxide semiconductor stacked layer.
Information query
IPC分类: