Invention Application
- Patent Title: PLANETARY WAFER CARRIERS
- Patent Title (中): 运输轮运输车
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Application No.: US15266308Application Date: 2016-09-15
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Publication No.: US20170076972A1Publication Date: 2017-03-16
- Inventor: Sandeep Krishnan , Lukas Urban , Alexander Gurary , Keng Moy , Ajit Paranjpe
- Applicant: Veeco Instruments Inc.
- Main IPC: H01L21/687
- IPC: H01L21/687

Abstract:
A wafer carrier for a plurality of wafers, the wafer carrier having a platen with a plurality of openings and a plurality of wafer retention platforms, the platen configured to rotate about a first axis, the plurality of wafer retention platforms configured to rotate about respective second axes, each of the wafer retention platforms rotatably coupled to one of the plurality of openings by friction reducing bearings, the platen and the plurality of wafer retention platforms and the friction reducing bearings all being constructed of the same material.
Information query
IPC分类: