Invention Application
- Patent Title: ACID REPLENISHING SYSTEM AND METHOD FOR ACID TANK
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Application No.: US14935210Application Date: 2015-11-06
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Publication No.: US20170098558A1Publication Date: 2017-04-06
- Inventor: Tzung-Wu Hou , Po-Lun Cheng , Meng-Che Yeh , Feng-Nan Chu
- Applicant: United Microelectronics Corp.
- Priority: TW104132781 20151006
- Main IPC: H01L21/67
- IPC: H01L21/67 ; C09K13/04 ; C09K13/08

Abstract:
An acid replenishing system includes an acid tank, a draining apparatus, an acid replenishing apparatus, and a control unit. The acid tank contains a used acid solution. The draining apparatus drains an amount of the used acid solution from the acid tank. The acid replenishing apparatus replenishes an amount of a replenishing acid into the acid tank. The control unit controls the draining apparatus and the acid replenishing apparatus to perform a plurality of acid replenishing stages, so a total set amount of the replenishing acid to be added into the acid tank has been replenished.
Information query
IPC分类: