- 专利标题: POLYCRYSTALLINE SILICON THIN-FILM TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME AND DISPLAY DEVICE
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申请号: US15104504申请日: 2015-07-17
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公开(公告)号: US20170133512A1公开(公告)日: 2017-05-11
- 发明人: Zheng Liu , Chunping Long , Yu-Cheng Chan , Xiaoyong Lu , Xiaolong Li
- 申请人: BOE TECHNOLOGY GROUP CO., LTD.
- 优先权: CN201510182184.2 20150416
- 国际申请: PCT/CN2015/084319 WO 20150717
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L27/12 ; H01L21/265 ; H01L29/66 ; H01L21/02
摘要:
The disclosure provides a polycrystalline silicon thin-film transistor and a method for manufacturing the same as well as a display device. The polycrystalline silicon thin-film transistor comprises: a substrate; an isolation layer formed on the substrate; and a polycrystalline silicon active layer formed on the substrate and the isolation layer, with two source-drain ion implantation regions being formed at both sides of the active layer, wherein the edges at both ends of the isolation layer are within the edges at both ends of the active layer. In the polycrystalline silicon thin-film transistor and the method for manufacturing the same provided by the disclosure, it is possible to increase the grain size of the active layer, improve the grain uniformity in a channel region thereof, effectively prevent deterioration of characteristics of the active layer caused by backlight irradiation, and improve the reliability of the device.
公开/授权文献
- US09837542B2 Polycrystalline silicon thin-film transistor 公开/授权日:2017-12-05
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