- 专利标题： Ordering Block Copolymers
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申请号： US15409125申请日： 2017-01-18
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公开(公告)号： US20170139326A1公开(公告)日： 2017-05-18
- 发明人: C. Grant Willson , Christopher Ellison , Michael Maher , Christopher Bates , Dustin Janes
- 申请人： Board of Regents The University of Texas System
- 专利权人： Board of Regents The University of Texas System
- 当前专利权人： Board of Regents The University of Texas System
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; G03F7/16 ; C09D153/00 ; G03F7/11
摘要：
A method for ordering block copolymers including forming a first layer having a first preference mode; and providing a reactive agent in selected regions of the first layer that modifies the selected regions to a second preference mode, wherein the selected regions define other regions of the first layer retaining the first preference mode thereby forming an alignment layer for block copolymers.
公开/授权文献
- US09823568B2 Ordering block copolymers 公开/授权日：2017-11-21
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