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公开(公告)号：US09557640B2
公开(公告)日：2017-01-31
申请号：US14656753
申请日：2015-03-13
CPC分类号： G03F7/20 , B81C1/00031 , B81C2201/0149 , C09D153/00 , C09D153/005 , G03F7/0002 , G03F7/11 , G03F7/16
摘要： A method for ordering block copolymers including forming a first layer having a first preference mode; and providing a reactive agent in selected regions of the first layer that modifies the selected regions to a second preference mode, wherein the selected regions define other regions of the first layer retaining the first preference mode thereby forming an alignment layer for block copolymers.
摘要翻译： 一种用于排序嵌段共聚物的方法，包括形成具有第一偏好模式的第一层; 以及在第一层的选定区域中提供反应剂，其将所选择的区域修改为第二偏好模式，其中所选择的区域限定保持第一偏好模式的第一层的其它区域，由此形成嵌段共聚物的取向层。
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公开(公告)号：US09823568B2
公开(公告)日：2017-11-21
申请号：US15409125
申请日：2017-01-18
CPC分类号： G03F7/20 , B81C1/00031 , B81C2201/0149 , C09D153/00 , C09D153/005 , G03F7/0002 , G03F7/11 , G03F7/16
摘要： A method for ordering block copolymers including forming a first layer having a first preference mode; and providing a reactive agent in selected regions of the first layer that modifies the selected regions to a second preference mode, wherein the selected regions define other regions of the first layer retaining the first preference mode thereby forming an alignment layer for block copolymers.
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公开(公告)号：US20170037065A1
公开(公告)日：2017-02-09
申请号：US15232138
申请日：2016-08-09
IPC分类号： C07F7/08 , G03F7/00 , H01L21/3105 , C09D163/00
CPC分类号： C07F7/0881 , C07D301/00 , C07D303/12 , C07F7/0838 , C07F7/0874 , C07F7/0878 , C07F7/0879 , C07F7/0889 , C07F7/0896 , C09D163/00 , G03F7/0002 , H01L21/31055
摘要： The present invention describes branched and functionalized siloxanes and methods for making such compounds. The compounds have a variety of uses. One preferred application is as novel planarizing material for lithogaphy, in which case functionalized branched siloxane, such as an epoxy-modified branched siloxane is particularly useful.
摘要翻译： 本发明描述了支链和官能化硅氧烷及其制备方法。 这些化合物具有多种用途。 一种优选的应用是用于石印的新型平面化材料，在这种情况下，官能化的支化硅氧烷，例如环氧改性的支化硅氧烷是特别有用的。
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公开(公告)号：US09434750B2
公开(公告)日：2016-09-06
申请号：US14681416
申请日：2015-04-08
IPC分类号： C07F7/08 , C07D303/12 , C07D301/00
CPC分类号： C07F7/0881 , C07D301/00 , C07D303/12 , C07F7/0838 , C07F7/0874 , C07F7/0878 , C07F7/0879 , C07F7/0889 , C07F7/0896 , C09D163/00 , G03F7/0002 , H01L21/31055
摘要： The present invention describes branched and functionalized siloxanes and methods for making such compounds. The compounds have a variety of uses. One preferred application is as novel planarizing material for lithography, in which case functionalized branched siloxane, such as an epoxy-modified branched siloxane is particularly useful.
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公开(公告)号：US20170139326A1
公开(公告)日：2017-05-18
申请号：US15409125
申请日：2017-01-18
IPC分类号： G03F7/20 , G03F7/16 , C09D153/00 , G03F7/11
CPC分类号： G03F7/20 , B81C1/00031 , B81C2201/0149 , C09D153/00 , C09D153/005 , G03F7/0002 , G03F7/11 , G03F7/16
摘要： A method for ordering block copolymers including forming a first layer having a first preference mode; and providing a reactive agent in selected regions of the first layer that modifies the selected regions to a second preference mode, wherein the selected regions define other regions of the first layer retaining the first preference mode thereby forming an alignment layer for block copolymers.
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公开(公告)号：US20150274757A1
公开(公告)日：2015-10-01
申请号：US14681416
申请日：2015-04-08
IPC分类号： C07F7/08
CPC分类号： C07F7/0881 , C07D301/00 , C07D303/12 , C07F7/0838 , C07F7/0874 , C07F7/0878 , C07F7/0879 , C07F7/0889 , C07F7/0896 , C09D163/00 , G03F7/0002 , H01L21/31055
摘要： The present invention describes branched and functionalized siloxanes and methods for making such compounds. The compounds have a variety of uses. One preferred application is as novel planarizing material for lithography, in which case functionalized branched siloxane, such as an epoxy-modified branched siloxane is particularly useful.
摘要翻译： 本发明描述了支链和官能化硅氧烷及其制备方法。 这些化合物具有多种用途。 一种优选的应用是用于光刻的新型平面化材料，在这种情况下，官能化的支化硅氧烷，例如环氧改性的支化硅氧烷是特别有用的。
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公开(公告)号：US20140342291A1
公开(公告)日：2014-11-20
申请号：US14242223
申请日：2014-04-01
CPC分类号： G03F7/213 , G03F7/004 , G03F7/0236 , G03F7/0382 , G03F7/095 , G03F7/40 , H01L21/0274 , H01L21/31116 , H01L21/31144
摘要： Dual tone photoresist formulations comprising a photoacid generator are described and employed in fabrication techniques, including methods of making structures on substrates, and more particularly, methods of making electronic devices (e.g. transistors and the like) on flexible substrates wherein two patterns are formed simultaneously in one layer of photoresist.
摘要翻译： 包括光致酸发生器的双色光致抗蚀剂制剂在制造技术中被描述和采用，包括在衬底上制造结构的方法，更具体地，涉及在柔性衬底上制造电子器件（例如晶体管等）的方法，其中两个图案同时形成 一层光刻胶。
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公开(公告)号：US10139724B2
公开(公告)日：2018-11-27
申请号：US14839147
申请日：2015-08-28
发明人： C. Grant Willson , Christopher John Ellison , Takehiro Sleshimo , Julia Cushen , Christopher M. Bates , Leon Dean , Logan J. Santos , Erica L. Rausch
IPC分类号： G03F1/50 , B05D1/00 , B05D5/00 , B05D7/00 , B81C1/00 , G03F7/00 , C09D137/00 , B82Y10/00 , B82Y40/00 , C09D167/00
摘要： The concepts described herein involve the use of random copolymer top coats that can be spin coated onto block copolymer thin films and used to control the interfacial energy of the top coat-block copolymer interface. The top coats are soluble in aqueous weak base and can change surface energy once they are deposited onto the block copolymer thin film. The use of self-assembled block copolymers to produce advanced lithographic patterns relies on their orientation control in thin films. Top coats potentially allow for the facile orientation control of block copolymers which would otherwise be quite challenging.
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公开(公告)号：US09802968B2
公开(公告)日：2017-10-31
申请号：US15232138
申请日：2016-08-09
IPC分类号： C07F7/08 , G03F7/00 , H01L21/3105 , C09D163/00 , C07D301/00 , C07D303/12
CPC分类号： C07F7/0881 , C07D301/00 , C07D303/12 , C07F7/0838 , C07F7/0874 , C07F7/0878 , C07F7/0879 , C07F7/0889 , C07F7/0896 , C09D163/00 , G03F7/0002 , H01L21/31055
摘要： The present invention describes branched and functionalized siloxanes and methods for making such compounds. The compounds have a variety of uses. One preferred application is as novel planarizing material for lithogaphy, in which case functionalized branched siloxane, such as an epoxy-modified branched siloxane is particularly useful.
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公开(公告)号：US20150261090A1
公开(公告)日：2015-09-17
申请号：US14656753
申请日：2015-03-13
IPC分类号： G03F7/20
CPC分类号： G03F7/20 , B81C1/00031 , B81C2201/0149 , C09D153/00 , C09D153/005 , G03F7/0002 , G03F7/11 , G03F7/16
摘要： A method for ordering block copolymers including forming a first layer having a first preference mode; and providing a reactive agent in selected regions of the first layer that modifies the selected regions to a second preference mode, wherein the selected regions define other regions of the first layer retaining the first preference mode thereby forming an alignment layer for block copolymers.
摘要翻译： 一种用于排序嵌段共聚物的方法，包括形成具有第一偏好模式的第一层; 以及在第一层的选定区域中提供反应剂，其将所选择的区域修改为第二偏好模式，其中所选择的区域限定保持第一偏好模式的第一层的其它区域，由此形成嵌段共聚物的取向层。
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