Invention Application
- Patent Title: SPRAY ASSEMBLY AND WET ETCHING DEVICE HAVING THE SAME
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Application No.: US14781137Application Date: 2015-07-08
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Publication No.: US20170140950A1Publication Date: 2017-05-18
- Inventor: Jia LI
- Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Priority: CN201510368699.1 20150629
- International Application: PCT/CN2015/083503 WO 20150708
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B05B15/08 ; B05B13/02

Abstract:
A spray assembly including a spray pipe with a bottom provided with a plurality of first through holes, each having a nozzle, wherein the nozzle includes a slider with an area larger than the first through hole, to cover the first through hole. The nozzle is connected to the slider and protrudes from the first through hole; the nozzle also includes a locking member to connect the slider to the spray pipe. The slider can move to adjust the position of the nozzle in the first through hole. There also provides a wet etching device including a spray unit, wherein the spray unit includes a plurality of spray assemblies as mentioned above, and a plurality of spray pipes in the plurality of spray assemblies are arranged in parallel with each other or approximately in parallel with each other.
Public/Granted literature
- US09892940B2 Spray assembly and wet etching device having the same Public/Granted day:2018-02-13
Information query
IPC分类: