Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURNG THE SAME
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Application No.: US15432142Application Date: 2017-02-14
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Publication No.: US20170155003A1Publication Date: 2017-06-01
- Inventor: Hajime TOKUNAGA , Takuya HANDA
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Priority: JP2012-171786 20120802
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/146 ; H01L29/45 ; H01L27/12 ; H01L29/24 ; H01L29/49

Abstract:
To provide a semiconductor device which has transistor characteristics with little variation and includes an oxide semiconductor. The semiconductor device includes an insulating film over a conductive film and an oxide semiconductor film over the insulating film. The oxide semiconductor film includes a first oxide semiconductor layer, a second oxide semiconductor layer over the first oxide semiconductor layer, and a third oxide semiconductor layer over the second oxide semiconductor layer. The energy level of a bottom of a conduction band of the second oxide semiconductor layer is lower than those of the first and third oxide semiconductor layers. An end portion of the second oxide semiconductor layer is positioned on an inner side than an end portion of the first oxide semiconductor layer.
Public/Granted literature
- US09761738B2 Semiconductor device having first and second oxide semiconductors with difference energy level Public/Granted day:2017-09-12
Information query
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