Invention Application
- Patent Title: Germanium Photodetector with SOI Doping Source
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Application No.: US15441345Application Date: 2017-02-24
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Publication No.: US20170162743A1Publication Date: 2017-06-08
- Inventor: Steven M. Shank , John J. Ellis-Monaghan , Marwan H. Khater , Jason S. Orcutt
- Applicant: GLOBALFOUNDRIES INC.
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L31/103 ; H01L31/0352 ; H01L31/0392 ; H01L31/0312

Abstract:
Various particular embodiments include a method for forming a photodetector, including: forming a structure including a barrier layer disposed between a layer of doped silicon (Si) and a layer of germanium (Ge), the barrier layer including a crystallization window; and annealing the structure to convert, via the crystallization window, the Ge to a first composition of silicon germanium (SiGe) and the doped Si to a second composition of SiGe.
Public/Granted literature
- US09806221B2 Germanium photodetector with SOI doping source Public/Granted day:2017-10-31
Information query
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