SEMICONDUCTORS, PACKAGES, WAFER LEVEL PACKAGES, AND METHODS OF MANUFACTURING THE SAME
Abstract:
According to various embodiments, there may be provided packages, semiconductors, and wafer level packages, and there may be provided methods of manufacturing packages, semiconductors, and wafer level packages. A method of manufacturing a wafer level package may include forming alignment marks at a surface of a protection wafer, mounting semiconductor dice on the protection wafer using the alignment marks, forming a first dielectric layer covering the semiconductor dice, planarizing a top surface of the first photosensitive layer, exposuring and developing portions of the planarized first dielectric layer to form opening portions exposing portions of the semiconductor dice, and forming redistribution lines on the first photosensitive dielectric layer. A second dielectric layer may be formed to cover the redistribution lines. Related wafer level packages may also be provided.
Public/Granted literature
Information query
Patent Agency Ranking
0/0