Invention Application
- Patent Title: PULSED-MODE DIRECT-WRITE LASER METALLIZATION
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Application No.: US15124036Application Date: 2015-04-05
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Publication No.: US20170178946A1Publication Date: 2017-06-22
- Inventor: Michael Zenou , Zvi Kotler , Jonathan Ankri , Abraham Rotnemer , Oleg Ermak
- Applicant: ORBOTECH LTD.
- Applicant Address: IL Yavne
- Assignee: ORBOTECH LTD.
- Current Assignee: ORBOTECH LTD.
- Current Assignee Address: IL Yavne
- International Application: PCT/IB2015/052476 WO 20150405
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H05K3/12

Abstract:
A method for manufacturing includes coating a substrate (22) with a matrix (28) containing a material to be patterned on the substrate. A pattern is fixed in the matrix by directing a pulsed energy beam to impinge on a locus of the pattern so as to cause adhesion of the material to the substrate along the pattern without fully sintering the material in the pattern. The matrix remaining on the substrate outside the fixed pattern is removed, and after removing the matrix, the material in the pattern is sintered.
Information query
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