- 专利标题: SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
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申请号: US15447692申请日: 2017-03-02
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公开(公告)号: US20170179266A1公开(公告)日: 2017-06-22
- 发明人: HIROYUKI TANAKA
- 申请人: LAPIS SEMICONDUCTOR CO., LTD.
- 优先权: JP2015-071476 20150331
- 主分类号: H01L29/739
- IPC分类号: H01L29/739 ; H01L29/08 ; H01L29/66 ; H01L29/10 ; H01L29/06
摘要:
A semiconductor device including: a P-type base region provided; an N-type emitter region provided inside the P-type base region; a P-type collector region that is provided on the surface layer portion of the N-type semiconductor layer and is separated from the P-type base region; a gate insulating film that is provided on the surface of the N-type semiconductor layer, and that contacts the P-type base region and the N-type emitter region; a gate electrode on the gate insulating film; a pillar shaped structure provided inside the N-type semiconductor layer between the P-type base region and the P-type collector region, wherein one end of the pillar shaped structure is connected to an N-type semiconductor that extends to the surface layer portion of the N-type semiconductor layer, and the pillar shaped structure includes an insulator extending in a depth direction of the N-type semiconductor layer.
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