- 专利标题: AUTOMATIC HANDLING APPARATUS
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申请号: US15314982申请日: 2015-05-13
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公开(公告)号: US20170190019A1公开(公告)日: 2017-07-06
- 发明人: Taichi YASUDA , Tatsuo ENOMOTO
- 申请人: SHIN-ETSU HANDOTAI CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU HANDOTAI CO., LTD.
- 当前专利权人: SHIN-ETSU HANDOTAI CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2014-123518 20140616
- 国际申请: PCT/JP2015/002425 WO 20150513
- 主分类号: B24B37/27
- IPC分类号: B24B37/27 ; H01L21/683 ; B25J15/06 ; H01L21/68 ; H01L21/02
摘要:
Automatic handling apparatus having a suction-head sucking and holding a workpiece, an arm is connected to and moves the suction-head, and a stage on which the workpiece to be carried to the carrier holding hole is mounted, the suction-head has a movable section which is movable within a parallel plane to the suction-head body, the movable section to suck and hold the workpiece, and has positioning pins stretched in vertically lower direction and, at loading time, the workpiece held by the movable section into the carrier holding hole, the positioning pins are appressed against tooth-bottoms of a gear on the carrier outer periphery and movable section moving within the parallel plane. The carrier is pushed against the sun gear side to fix the carrier position and direction, and the held workpiece is carried into the holding hole. Consequently, the automatic handling apparatus load the workpiece into the carrier holding hole.
公开/授权文献
- US09931730B2 Automatic handling apparatus with positioning pins 公开/授权日:2018-04-03
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