Invention Application
- Patent Title: TRANSISTOR GATE METAL WITH LATERALLY GRADUATED WORK FUNCTION
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Application No.: US15327641Application Date: 2014-08-19
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Publication No.: US20170207312A1Publication Date: 2017-07-20
- Inventor: Chia-Hong Jan , Walid Hafez , Hsu-Yu Chang , Roman Olac-Vaw , Ting Chang , Rahul Ramaswamy , Pei-Chi Liu , Neville Dias
- Applicant: Intel Corporation
- International Application: PCT/US14/51619 WO 20140819
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L23/66 ; H01L21/8234 ; H01L27/088 ; H01L23/535

Abstract:
Semiconductor device(s) including a transistor with a gate electrode having a work function monotonically graduating across the gate electrode length, and method(s) to fabricate such a device. In embodiments, a gate metal work function is graduated between source and drain edges of the gate electrode for improved high voltage performance. In embodiments, thickness of a gate metal graduates from a non-zero value at the source edge to a greater thickness at the drain edge. In further embodiments, a high voltage transistor with graduated gate metal thickness is integrated with another transistor employing a gate electrode metal of nominal thickness. In embodiments, a method of fabricating a semiconductor device includes graduating a gate metal thickness between a source end and drain end by non-uniformly recessing the first gate metal within the first opening relative to the surrounding dielectric.
Public/Granted literature
- US10192969B2 Transistor gate metal with laterally graduated work function Public/Granted day:2019-01-29
Information query
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