Invention Application
- Patent Title: CONDUCTIVE WAFER LIFT PIN O-RING GRIPPER WITH RESISTOR
-
Application No.: US15418656Application Date: 2017-01-27
-
Publication No.: US20170221750A1Publication Date: 2017-08-03
- Inventor: Roberto Cesar COTLEAR , Michael D. WILLWERTH
- Applicant: Applied Materials, Inc.
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01J37/32 ; H01L21/683
Abstract:
Embodiments of the present disclosure generally relate to a lift pin assembly used for de-chucking substrates. The lift pin assembly includes a base and one or more lift pin holders. Each lift pin holder includes a first portion and a second portion. The first portion is coupled to the base by a metal connector and the second portion is coupled to the first portion by a metal connector. A resistor is disposed in the first portion of the lift pin holder. The second portion includes a lift pin support for supporting a lift pin. The lift pin, the lift pin support, and the metal connectors are electrically conductive. The base is connected to a reference voltage, such as the ground, forming a path for the residual electrostatic charge in the substrate from the substrate to the reference voltage.
Public/Granted literature
- US11387135B2 Conductive wafer lift pin o-ring gripper with resistor Public/Granted day:2022-07-12
Information query
IPC分类:
