公开(公告)号：US20150137681A1

公开(公告)日：2015-05-21

申请号：US14246419

申请日：2014-04-07

Applicant: Applied Materials, Inc.

Inventor： Siu Tang NG ,  Changhun LEE ,  Huutri DAO ,  Roberto Cesar COTLEAR

IPC: H05H1/46

CPC classification number: H05H1/46 ,  H05H2001/4652

Abstract: Plasma generation source employing dielectric conduit assemblies having removable interfaces and related assemblies and methods are disclosed. The plasma generation source (PGS) includes an enclosure body having multiple internal surfaces forming an internal chamber having input and output ports to respectively receive a precursor gas for generation of plasma and to discharge the plasma. A dielectric conduit assembly may guide the gas and the plasma away from the internal surface where particulates may be generated. The dielectric conduit assembly includes a first and second cross-conduit segments. The dielectric conduit assembly further includes parallel conduit segments extending from the second cross-conduit segment to distal ends which removably align with first cross-conduit interfaces of the first cross-conduit segment without leaving gaps. In this manner, the dielectric conduit assembly is easily serviced, and reduces and contains particulate generation away from the output port.

Abstract translation: 公开了采用具有可移除接口和相关组件和方法的介质导管组件的等离子体产生源。 等离子体发生源（PGS）包括具有多个内表面的外壳主体，形成具有输入和输出端口的内部腔室，以分别容纳用于产生等离子体的前体气体并排出等离子体。 电介质导管组件可以引导气体和等离子体远离可能产生微粒的内表面。 介电导管组件包括第一和第二交叉导管段。 电介质导管组件还包括从第二交叉导管段延伸到远端的平行导管段，其可移除地与第一交叉导管段的第一交叉导管接口对准，而不留下间隙。 以这种方式，电介质导管组件易于维护，并且减少并且包含远离输出端口的颗粒产生。

公开(公告)号：US20170221750A1

公开(公告)日：2017-08-03

申请号：US15418656

申请日：2017-01-27

Applicant: Applied Materials, Inc.

Inventor： Roberto Cesar COTLEAR ,  Michael D. WILLWERTH

IPC: H01L21/687 ,  H01J37/32 ,  H01L21/683

CPC classification number: H01L21/68742 ,  H01J37/3211 ,  H01J37/32183 ,  H01J37/32715 ,  H01L21/6831

Abstract: Embodiments of the present disclosure generally relate to a lift pin assembly used for de-chucking substrates. The lift pin assembly includes a base and one or more lift pin holders. Each lift pin holder includes a first portion and a second portion. The first portion is coupled to the base by a metal connector and the second portion is coupled to the first portion by a metal connector. A resistor is disposed in the first portion of the lift pin holder. The second portion includes a lift pin support for supporting a lift pin. The lift pin, the lift pin support, and the metal connectors are electrically conductive. The base is connected to a reference voltage, such as the ground, forming a path for the residual electrostatic charge in the substrate from the substrate to the reference voltage.

公开(公告)号：US20170032997A1

公开(公告)日：2017-02-02

申请号：US15135496

申请日：2016-04-21

Applicant: Applied Materials, Inc.

Inventor： Michael D. WILLWERTH ,  Roberto Cesar COTLEAR

IPC: H01L21/687 ,  H01L21/67 ,  H01L21/683 ,  B66F3/24

CPC classification number: H01L21/68742 ,  B66F3/25 ,  H01L21/6831

Abstract: Implementations described herein provide a lift pin actuator. The lift pin actuator has a housing. The housing has an interior volume. A track is disposed in the interior volume and coupled to the housing. A center shaft is at least partially disposed in the interior volume of the housing. A guide is movably coupled to the track. At least one internal bellows is disposed in the interior volume, the internal bellows form a seal between the center shaft and the housing. An elastic member is disposed in the interior volume and configured to apply a force that retracts the center shaft into the housing. An inlet port is configured to introduce fluid into the interior volume between the internal bellows and the housing. The fluid generates a force opposing the elastic member to extend the center shaft relative to the housing.

Abstract translation: 本文所述的实施例提供了提升销致动器。 升降销致动器具有壳体。 外壳具有内部容积。 轨道设置在内部体积中并且联接到壳体。 中心轴至少部分地设置在壳体的内部空间中。 引导件可移动地联接到轨道。 至少一个内部波纹管设置在内部空间中，内部波纹管在中心轴和壳体之间形成密封。 弹性构件设置在内部容积中并且构造成施加将中心轴缩回到壳体中的力。 入口端口构造成将流体引入内部波纹管和壳体之间的内部空间。 流体产生与弹性构件相对的力，以相对于壳体延伸中心轴。