Invention Application
- Patent Title: SYSTEM AND METHOD BASED ON MULTI-SOURCE DEPOSITION FOR FABRICATING PEROVSKITE FILM
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Application No.: US15502331Application Date: 2015-07-08
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Publication No.: US20170226641A1Publication Date: 2017-08-10
- Inventor: Yabing Qi , Luis Katsuya Ono , Shenghao Wang
- Applicant: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
- Applicant Address: JP Kunigami-gun, Okinawa
- Assignee: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
- Current Assignee: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
- Current Assignee Address: JP Kunigami-gun, Okinawa
- International Application: PCT/JP2015/003450 WO 20150708
- Main IPC: C23C16/52
- IPC: C23C16/52 ; C23C16/455 ; C23C16/46 ; C23C16/40

Abstract:
A system and method for fabricating a perovskite film is provided, the system including a substrate stage configured to rotate around its central axis at a rotation speed, a first set of evaporation units, each coupled to the side section or the bottom section of the chamber, a second set of evaporation units coupled to the bottom section, and a shield defining two or more zones having respective horizontal cross-sectional areas, which are open and facing the substrate, designated for the two or more evaporation units in the second set. The resultant perovskite film includes multiple unit layers, wherein each unit layer is formed by one rotation of the substrate stage, and the composition and thickness of the unit layer are controlled by adjusting at least the evaporation rates, the rotation speed and the horizontal cross-sectional areas.
Information query
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