Invention Application
- Patent Title: METHOD OF PRODUCING IMAGING PANEL, IMAGING PANEL, AND X-RAY IMAGING DEVICE
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Application No.: US15501500Application Date: 2015-07-30
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Publication No.: US20170236855A1Publication Date: 2017-08-17
- Inventor: Kazuhide TOMIYASU , Tadayoshi MIYAMOTO
- Applicant: Sharp Kabushiki Kaisha
- Priority: JP2014-159792 20140805
- International Application: PCT/JP2015/071576 WO 20150730
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H04N5/32 ; G01T1/20

Abstract:
An imaging panel (10) includes a photodiode (15), and a metal layer (43) provided below the photodiode and being in contact with a TFT (14) via a contact hole (CH1). A method of producing the imaging panel (10) includes forming a metal film (43p) covering to protect a first insulating film (42), subsequently forming semiconductor films to configure an n-type amorphous silicon layer (151), an intrinsic amorphous silicon layer (152), and a p-type amorphous silicon layer (153), and further forming the photodiode (15) by patterning the semiconductor films through dry etching.
Information query
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