Invention Application
- Patent Title: IMAGING PANEL, METHOD OF PRODUCING IMAGING PANEL, AND X-RAY IMAGING DEVICE
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Application No.: US15501506Application Date: 2015-07-30
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Publication No.: US20170236856A1Publication Date: 2017-08-17
- Inventor: Kazuhide TOMIYASU , Tadayoshi MIYAMOTO
- Applicant: Sharp Kabushiki Kaisha
- Priority: JP2014-159793 20140805
- International Application: PCT/JP2015/071574 WO 20150730
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H04N5/32 ; G01T1/20

Abstract:
It is an object of the invention to secure a large area of a photodiode and suppress operation property variation and malfunction in an imaging panel and an X-ray imaging device. An imaging panel (10) includes a substrate (40), a TFT (14), an interlayer insulating film (44), a metal layer (45), and a photodiode (15). A data line (12) and the photodiode (15) face each other in a thickness direction of the substrate. The interlayer insulating film (44), which is disposed between the TFT (14) and the photodiode (15), is an SOG film or a photosensitive resin film.
Information query
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