Invention Application
- Patent Title: MULTIPLE MEMS DEVICE AND METHODS
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Application No.: US15444162Application Date: 2017-02-27
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Publication No.: US20170248628A1Publication Date: 2017-08-31
- Inventor: Sanjay BHANDARI , Ken WANG , Ben LEE
- Applicant: mCube, Inc.
- Applicant Address: US CA San Jose
- Assignee: mCube, Inc.
- Current Assignee: mCube, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: G01P15/08
- IPC: G01P15/08 ; B81B7/00

Abstract:
A method for operating an electronic device comprising a first and second MEMS device and a semiconductor substrate disposed upon a mounting substrate includes subjecting the first MEMS device and the second MEMS device to physical perturbations, wherein the physical perturbations comprise first physical perturbations associated with the first MEMS device and second physical perturbations associated with the second MEMS device, wherein the first physical perturbations and the second physical perturbations are substantially contemporaneous, determining in a plurality of CMOS circuitry formed within the one or more semiconductor substrates, first physical perturbation data from the first MEMS device in response to the first physical perturbations and second physical perturbation data from the second MEMS device in response to the second physical perturbations, determining output data in response to the first physical perturbation data and to the second physical perturbation data, and outputting the output data.
Public/Granted literature
- US10605823B2 Multiple MEMS device and methods Public/Granted day:2020-03-31
Information query
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