发明申请
- 专利标题: TEST METHOD AND STRUCTURE FOR INTEGRATED CIRCUITS BEFORE COMPLETE METALIZATION
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申请号: US15062484申请日: 2016-03-07
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公开(公告)号: US20170256468A1公开(公告)日: 2017-09-07
- 发明人: Janakiraman Viraraghavan , Ramesh Raghavan , Balaji Jayaraman , Thejas Kempanna , Rajesh R. Tummuru , Toshiaki Kirihata
- 申请人: GLOBALFOUNDRIES INC.
- 主分类号: H01L21/66
- IPC分类号: H01L21/66 ; H01L27/105 ; H01L49/02 ; H01L27/115
摘要:
Aspects of the present disclosure include methods and test structures for an intermediate metal level of an integrated circuit (IC). A method according to the present disclosure can include: fabricating a first plurality of metal levels including an intermediate metal level of an IC structure, the intermediate metal level being one of a plurality of metal levels in the IC structure other than a capping metal level of the IC structure; performing a first functional test on a first circuit positioned within the intermediate metal level; fabricating a second plurality of metal levels after performing the first functional test, the second plurality of metal levels including the capping metal level of the IC structure; and performing a second functional test on a second circuit positioned within the plurality of metal levels, after the fabricating of the capping metal level.
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