- 专利标题: POLYCRYSTALLINE SILICON, FZ SINGLE CRYSTAL SILICON, AND METHOD FOR PRODUCING THE SAME
-
申请号: US15432171申请日: 2017-02-14
-
公开(公告)号: US20170283986A1公开(公告)日: 2017-10-05
- 发明人: Shuichi MIYAO , Shigeyoshi NETSU
- 申请人: Shin-Etsu Chemical Co., Ltd.
- 申请人地址: JP Tokyo
- 专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2016-075072 20160404
- 主分类号: C30B28/14
- IPC分类号: C30B28/14 ; C30B29/06 ; C23C16/24 ; C30B13/08
摘要:
When FZ single crystal silicon is produced from polycrystalline silicon, which is synthesized by the Siemens method followed by being subjected to thermal treatment and includes crystal grains having a Miller index plane or as a principal plane and grown by the thermal treatment, and in which the X-ray diffraction intensity from either of the Miller index planes and after the thermal treatment is 1.5 times or less the X-ray diffraction intensity before the thermal treatment, as raw material, disappearance of crystal lines in the step of forming an FZ single crystal is markedly prevented.
公开/授权文献
信息查询
IPC分类: