- 专利标题: System and Method for a Transducer in an eWLB Package
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申请号: US15086573申请日: 2016-03-31
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公开(公告)号: US20170284951A1公开(公告)日: 2017-10-05
- 发明人: Stephan Pindl , Daniel Lugauer , Dominic Maier , Alfons Dehe
- 申请人: Infineon Technologies AG
- 主分类号: G01N27/02
- IPC分类号: G01N27/02 ; H01L21/56 ; H01L23/538 ; H05K1/18 ; H01L23/31
摘要:
According to an embodiment, a sensor package includes an electrically insulating substrate including a cavity in the electrically insulating substrate, an ambient sensor, an integrated circuit die embedded in the electrically insulating substrate, and a plurality of conductive interconnect structures coupling the ambient sensor to the integrated circuit die. The ambient sensor is supported by the electrically insulating substrate and arranged adjacent the cavity.
公开/授权文献
- US10186468B2 System and method for a transducer in an eWLB package 公开/授权日:2019-01-22
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