Invention Application
- Patent Title: SOLUTION PRECURSOR PLASMA SPRAY OF CERAMIC COATING FOR SEMICONDUCTOR CHAMBER APPLICATIONS
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Application No.: US15479209Application Date: 2017-04-04
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Publication No.: US20170291856A1Publication Date: 2017-10-12
- Inventor: Jennifer Y. Sun , Yikai Chen , Chengtsin Lee
- Applicant: Applied Materials, Inc.
- Main IPC: C04B35/505
- IPC: C04B35/505 ; C23C4/134 ; C04B22/14 ; C04B41/00 ; C04B35/626 ; C23C4/16 ; C04B41/45
Abstract:
Disclosed herein are methods for producing an ultra-dense and ultra-smooth ceramic coating. A method includes feeding a solution comprising a metal precursor into a plasma sprayer. The plasma sprayer generates a stream toward an article, forming a ceramic coating on the article upon contact.
Information query
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