- 专利标题: DOPANT COMPOSITIONS FOR ION IMPLANTATION
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申请号: US15483522申请日: 2017-04-10
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公开(公告)号: US20170292186A1公开(公告)日: 2017-10-12
- 发明人: Aaron Reinicker , Ashwini K Sinha
- 申请人: Aaron Reinicker , Ashwini K Sinha
- 主分类号: C23C14/48
- IPC分类号: C23C14/48 ; H01J37/317
摘要:
The present invention relates to an improved composition for ion implantation. The composition comprises a dopant source and an assistant species wherein the assistant species in combination with the dopant gas produces a beam current of the desired dopant ion. The criteria for selecting the assistant species is based on the combination of the following properties: ionization energy, total ionization cross sections, bond dissociation energy to ionization energy ratio, and a certain composition.
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