Provided are a corrosion-resistant member in which, in a case where the corrosion-resistant member is used as a member for an electrostatic chuck, an adsorption force of the electrostatic chuck can be made to be strong when an electric field is applied and a residual adsorption force of the electrostatic chuck can be made to be weak when the application of the electric field is stopped; a member for an electrostatic chuck; and a process for producing a corrosion-resistant member. The corrosion-resistant member includes an oxide which includes samarium and aluminum and has a perovskite type structure. The member for an electrostatic chuck includes the corrosion-resistant member according to the present invention. The process for producing a corrosion-resistant member according to the present invention includes: a step of mixing aluminum oxide powder and samarium oxide powder with a solvent to prepare a slurry including the aluminum oxide powder and the samarium oxide powder; a step of drying the slurry to prepare a mixed powder including the aluminum powder and the samarium oxide powder, and molding the mixed powder to prepare a green body; and a step of calcinating the green body to prepare a sintered body.