Invention Application
- Patent Title: NONVOLATILE MEMORY DEVICES AND METHODS OF FORMING SAME
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Application No.: US15613602Application Date: 2017-06-05
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Publication No.: US20170301688A1Publication Date: 2017-10-19
- Inventor: Woong-Seop Lee , Seokcheon Baek , Jinhyun Shin
- Applicant: Samsung Electronics Co., Ltd.
- Priority: KR10-2015-0164177 20151123
- Main IPC: H01L27/115
- IPC: H01L27/115

Abstract:
A vertical NAND-type memory device includes a vertical stack of inter-gate insulating layers and gate electrodes arranged in an alternating sequence on an underlying substrate, which includes a cell array region and a contact region therein. At least one NAND-type channel structure is provided, which extends vertically through the vertical stack of inter-gate insulating layers and gate electrodes. An end sidewall of a first of the gate electrodes, which extends laterally over at least a portion of the contact region, has a vertical slope that is less steep than vertical slopes of end sidewalls of a first plurality of the gate electrodes extending between the first of the gate electrodes and the substrate.
Public/Granted literature
- US10153295B2 Nonvolatile memory devices and methods of forming same Public/Granted day:2018-12-11
Information query
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