- 专利标题: NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
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申请号: US15634597申请日: 2017-06-27
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公开(公告)号: US20170301690A1公开(公告)日: 2017-10-19
- 发明人: Soodoo Chae , Myoungbum Lee , HuiChang Moon , Hansoo Kim , JinGyun Kim , Kihyun Kim , Siyoung Choi , Hoosung Cho
- 申请人: Soodoo Chae , Myoungbum Lee , HuiChang Moon , Hansoo Kim , JinGyun Kim , Kihyun Kim , Siyoung Choi , Hoosung Cho
- 优先权: KR10-2008-0121886 20081203; KR10-2009-0016406 20090226
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L23/522
摘要:
A three-dimensional nonvolatile memory device and a method for fabricating the same include a semiconductor substrate, a plurality of active pillars, a plurality of gate electrodes, and a plurality of supporters. The semiconductor substrate includes a memory cell region and a contact region. The active pillars extend in the memory cell region perpendicularly to the semiconductor substrate. The gate electrodes intersect the active pillars, extend from the memory cell region to the contact region and are stacked on the semiconductor substrate. The supporters extend in the contact region perpendicularly to the semiconductor substrate to penetrate at least one or more of the gate electrodes.
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