发明申请
- 专利标题： Toroidal Plasma Channel with Varying Cross-Section Areas Along the Channel
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申请号： US15646017申请日： 2017-07-10
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公开(公告)号： US20170309456A1公开(公告)日： 2017-10-26
- 发明人: Chaolin Hu , Xing Chen
- 申请人： MKS Instruments, Inc.
- 主分类号： H01J37/32
- IPC分类号： H01J37/32 ; C23C16/455 ; C23C16/50 ; F17D1/04 ; G21B1/17 ; H05H1/12
摘要：
An assembly for adjusting gas flow patterns and gas-plasma interactions including a toroidal plasma chamber. The toroidal plasma chamber has an injection member, an output member, a first side member and a second side member that are all connected. The first side member has a first inner cross-sectional area in at least a portion of the first side member and a second inner cross-sectional area in at least another portion of the first side member, where the first inner cross-sectional area and the second inner-cross-sectional area being different. The second side member has a third inner cross-sectional area in at least a portion of the second side member and a fourth inner cross-sectional area in at least another portion of the second side member, where the third inner cross-sectional area and the fourth inner-cross-sectional area being different.
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