Invention Application
- Patent Title: SEMICONDUCTOR DEVICE COMPRISING AN APERTURE ARRAY AND METHOD OF PRODUCING SUCH A SEMICONDUCTOR DEVICE
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Application No.: US15528089Application Date: 2015-11-09
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Publication No.: US20170309665A1Publication Date: 2017-10-26
- Inventor: Joerg SIEGERT , Franz SCHRANK , Martin SCHREMS
- Applicant: ams AG
- Priority: EP14193859.7 20141119
- International Application: PCT/EP2015/076063 WO 20151109
- Main IPC: H01L27/146
- IPC: H01L27/146
Abstract:
A photosensor (2) is arranged in a semiconductor substrate (1) at a main surface (10), a dielectric layer (4) is arranged on or above the main surface, the dielectric layer including a metal layer (6) electrically connected with the photosensor, and an aperture layer (16) formed from an opaque or semitransparent material is arranged on or above the dielectric layer. The aperture layer is provided with an array of transparent aperture zones (18) above the photosensor, each of the aperture zones penetrating the aperture layer.
Public/Granted literature
- US10283541B2 Semiconductor device comprising an aperture array and method of producing such a semiconductor device Public/Granted day:2019-05-07
Information query
IPC分类:
