Invention Application
- Patent Title: SYSTEM AND METHOD FOR ALL WRAP AROUND POROUS SILICON FORMATION
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Application No.: US15532001Application Date: 2015-12-07
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Publication No.: US20170317225A1Publication Date: 2017-11-02
- Inventor: Takao YONEHARA , Pravin K. NARWANKAR , Jonathan S. FRANKEL
- Applicant: APPLIED MATERIALS, INC.
- International Application: PCT/US2015/064194 WO 20151207
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L21/683

Abstract:
Methods and systems for all wrap around porous silicon formation are provided herein. In some embodiments, a substrate holder used for all wrap around porous silicon formation may include a body having a tapered opening along a first edge of the body, wherein the tapered opening is configured to release byproduct gases produced during porous silicon formation on a substrate supported by the substrate holder, a first vacuum channel formed in the body and extending to a first surface of the body, and a first sealing element disposed on the first surface of the body and fluidly coupled to the first vacuum channel, where in the first sealing element supports the substrate when disposed thereon.
Information query
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