Invention Application
- Patent Title: ELECTRONIC DEVICE INCLUDING SIDE GATE AND TWO-DIMENSIONAL MATERIAL CHANNEL AND METHOD OF MANUFACTURING THE ELECTRONIC DEVICE
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Application No.: US15605057Application Date: 2017-05-25
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Publication No.: US20170330935A1Publication Date: 2017-11-16
- Inventor: Jinseong HEO , Kiyoung Lee , Jaeho Lee , Seongjun Park
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2015-0049214 20150407
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/786 ; H01L29/78 ; H01L21/225 ; H01L29/66 ; H01L29/423 ; H01L29/417

Abstract:
Provided are electronic devices and methods of manufacturing same. An electronic device includes an energy barrier forming layer on a substrate, an upper channel material layer on the substrate, and a gate electrode that covers the upper channel material layer and the energy barrier forming layer. The gate electrode includes a side gate electrode portion that faces a side surface of the energy barrier forming layer. The side gate electrode may be configured to cause an electric field to be applied directly on the energy barrier forming layer via the side surface of the energy barrier forming layer, thereby enabling adjustment of the energy barrier between the energy barrier forming layer and the upper channel material layer. The electronic device may further include a lower channel material layer that is provided on the substrate and does not contact the upper channel material layer.
Public/Granted literature
Information query
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