Invention Application
- Patent Title: MOTOR, ACTUATOR, SEMICONDUCTOR MANUFACTURING APPARATUS, AND FLAT DISPLAY MANUFACTURING APPARATUS
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Application No.: US15536418Application Date: 2015-12-24
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Publication No.: US20170331343A1Publication Date: 2017-11-16
- Inventor: Hideya HIGUCHI , Tsuyoshi NAKAMURA , Hayao WATANABE
- Applicant: NSK LTD.
- Applicant Address: JP Tokyo
- Assignee: NSK LTD.
- Current Assignee: NSK LTD.
- Current Assignee Address: JP Tokyo
- Priority: JP2015-023323 20150209
- International Application: PCT/JP2015/086077 WO 20151224
- Main IPC: H02K5/10
- IPC: H02K5/10 ; F16C35/067 ; F16C35/07 ; H02K9/24 ; H02K5/20 ; H02K5/173

Abstract:
Provided is a motor capable of more reliably preventing dust generated therein from flowing to the outside. A motor includes a stator, a rotor, a rotor housing which rotates along with the rotor, a stator housing which fixes the stator thereto, includes spaces formed with respect to the rotor housing, and overlaps the rotor housing with first gaps interposed therebetween in the entire circumferential direction, annular members which overlap the stator housing with second gaps interposed therebetween in the entire circumferential direction inside the spaces, exhaust holes which suck and discharge air inside the spaces through the second gaps, and exhaust grooves.
Public/Granted literature
- US10432055B2 Motor, actuator, semiconductor manufacturing apparatus, and flat display manufacturing apparatus Public/Granted day:2019-10-01
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