MOTOR, ACTUATOR, SEMICONDUCTOR MANUFACTURING APPARATUS, AND FLAT DISPLAY MANUFACTURING APPARATUS
Abstract:
Provided is a motor capable of more reliably preventing dust generated therein from flowing to the outside. A motor includes a stator, a rotor, a rotor housing which rotates along with the rotor, a stator housing which fixes the stator thereto, includes spaces formed with respect to the rotor housing, and overlaps the rotor housing with first gaps interposed therebetween in the entire circumferential direction, annular members which overlap the stator housing with second gaps interposed therebetween in the entire circumferential direction inside the spaces, exhaust holes which suck and discharge air inside the spaces through the second gaps, and exhaust grooves.
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