公开(公告)号：US20190337106A1

公开(公告)日：2019-11-07

申请号：US15746950

申请日：2016-03-15

Applicant: NSK LTD.

Inventor： Tsuyoshi NAKAMURA ,  Takashi KURAMOCHI

IPC: B23Q1/62 ,  F16C29/00 ,  G03F7/00 ,  G03F7/20

Abstract: A table apparatus includes a first driver applying force in a first axis direction to a table, and a second driver applying force in a second axis direction to the table. The first driver includes a first actuator generating power for moving the table in the first axis direction, and a first movable member moving along a first drive axis parallel to the first axis by actuation of the first actuator. The first movable member includes: a first linear bearing moving along the first drive axis; a first rotary bearing disposed around a first rod member fixed to the first linear bearing and rotatable relative to the first rod member; and a second linear bearing connected to the first rotary bearing and guided in the second axis direction by a second guide member fixed to an edge of the table in the first axis direction.

公开(公告)号：US20160318140A1

公开(公告)日：2016-11-03

申请号：US15105010

申请日：2014-12-16

Applicant: NSK LTD.

Inventor： Hideya HIGUCHI ,  Tsuyoshi NAKAMURA

IPC: B23Q1/48 ,  B23Q1/62 ,  F16C29/04 ,  B23Q1/40

CPC classification number: B23Q1/48 ,  B23Q1/40 ,  B23Q1/62 ,  F16C29/00 ,  F16C29/04

Abstract: One first drive unit that advances or recedes in the X-direction and that exerts a drive force in the X-direction to a movable table is arranged to exert a drive force to a center position in the Y-direction of one end part in the X-direction of the movable table. Two second drive units that advance or recede in the Y-direction that is perpendicular to the X-direction, and that exert the drive forces in the Y-direction to the movable table are arranged to be point-symmetric with respect to the center of the movable table as the center of symmetry. Plural plane guide bearings are arranged at positions such that the total sum of the moment forces of the respective plane guide bearings is zero on the center axis line in the X-direction of the movable table.

Abstract translation: 一个第一驱动单元，其沿X方向前进或后退，并且在X方向上向可移动台施加驱动力，该驱动单元被布置成在所述X方向上的一个端部的Y方向上的中心位置施加驱动力 活动台X方向。 在与X方向垂直的Y方向上前进或后退的两个第二驱动单元，并且将沿Y方向的驱动力施加到可移动台，被布置为相对于 活动台为对称中心。 多个平面导向轴承布置在使得各个平面导向轴承的力矩的总和在可移动台的X方向上的中心轴线上为零的位置处。

公开(公告)号：US20160300742A1

公开(公告)日：2016-10-13

申请号：US15100406

申请日：2014-12-10

Applicant: NSK LTD.

Inventor： Hideya HIGUCHI ,  Tsuyoshi NAKAMURA ,  Hideki KON

IPC: H01L21/67 ,  H01L21/673 ,  H01L21/687

Abstract: A sealing mechanism functioning as a separator between two spaces having different pressures includes: a housing; a shaft inserted into the housing; an annular sealing member sealing a gap by contacting a radial outer surface of the shaft or a radial outer surface of a rotary portion fixed to the shaft; and a lubricant groove storing a lubricant to be supplied between the annular sealing member and the radial outer surface.

Abstract translation: 用作具有不同压力的两个空间之间的分离器的密封机构包括：壳体; 插入壳体中的轴; 环形密封构件，其通过接触所述轴的径向外表面或固定到所述轴的旋转部分的径向外表面而密封间隙; 以及润滑剂槽，其存储要供给到环形密封构件和径向外表面之间的润滑剂。

公开(公告)号：US20170331343A1

公开(公告)日：2017-11-16

申请号：US15536418

申请日：2015-12-24

Applicant: NSK LTD.

Inventor： Hideya HIGUCHI ,  Tsuyoshi NAKAMURA ,  Hayao WATANABE

IPC: H02K5/10 ,  F16C35/067 ,  F16C35/07 ,  H02K9/24 ,  H02K5/20 ,  H02K5/173

CPC classification number: H02K5/10 ,  F16C35/067 ,  F16C35/07 ,  H02K5/04 ,  H02K5/1732 ,  H02K5/1737 ,  H02K5/20 ,  H02K7/086 ,  H02K7/088 ,  H02K9/24 ,  H02K21/22 ,  H02K2205/09 ,  H02K2213/03

Abstract: Provided is a motor capable of more reliably preventing dust generated therein from flowing to the outside. A motor includes a stator, a rotor, a rotor housing which rotates along with the rotor, a stator housing which fixes the stator thereto, includes spaces formed with respect to the rotor housing, and overlaps the rotor housing with first gaps interposed therebetween in the entire circumferential direction, annular members which overlap the stator housing with second gaps interposed therebetween in the entire circumferential direction inside the spaces, exhaust holes which suck and discharge air inside the spaces through the second gaps, and exhaust grooves.

公开(公告)号：US20160290510A1

公开(公告)日：2016-10-06

申请号：US15036188

申请日：2014-12-10

Applicant: NSK LTD.

Inventor： Tsuyoshi NAKAMURA ,  Hideki KON ,  Hideya HIGUCHI

IPC: F16J15/3284 ,  H01L21/687

CPC classification number: F16J15/3284 ,  F16C19/54 ,  F16C33/7886 ,  F16C35/06 ,  F16C2226/60 ,  H01L21/67126 ,  H01L21/68792

Abstract: A sealing mechanism functioning as a separator between two spaces having different pressures or gases, includes: a housing; a shaft inserted into the housing; and a plurality of annular sealing members sealing a gap by contacting a part of the shaft or a radial outer surface of a rotary portion fixed to the shaft. The respective annular sealing members include materials having different material quality and are disposed at different positions in an axial direction parallel to a center axis of the shaft.

Abstract translation: 用作具有不同压力或气体的两个空间之间的分离器的密封机构包括：壳体; 插入壳体中的轴; 以及多个环形密封构件，其通过使所述轴的一部分或固定到所述轴的旋转部的径向外表面接触来密封间隙。 相应的环形密封构件包括具有不同材料质量的材料，并且设置在平行于轴的中心轴线的轴向方向上的不同位置。

公开(公告)号：US20170037907A1

公开(公告)日：2017-02-09

申请号：US15102348

申请日：2014-12-24

Applicant: NSK Ltd.

Inventor： Tsuyoshi NAKAMURA

IPC: F16C41/00 ,  B23Q11/00 ,  H02K9/14 ,  H01L21/683 ,  H02K5/173 ,  F16C19/54 ,  H01L21/687

CPC classification number: F16C41/005 ,  B23Q1/70 ,  B23Q11/0046 ,  B23Q11/0883 ,  F16C17/08 ,  F16C19/543 ,  F16C21/00 ,  F16C32/0614 ,  F16C32/0622 ,  F16C32/0692 ,  F16C39/04 ,  F16C2235/00 ,  F16C2300/22 ,  F16C2322/39 ,  F16C2380/18 ,  F16J15/40 ,  H01L21/6838 ,  H01L21/68792 ,  H02K5/124 ,  H02K5/16 ,  H02K5/1735 ,  H02K9/04 ,  H02K9/14

Abstract: A rotation mechanism includes: a housing; a shaft inserted through a hole provided at the housing; bearings installed at the housing and rotatably supporting the shaft; a rotary member provided at one end portion of the shaft, adapted to be rotated together with the shaft, and having a portion that projects to a radially outer side of the hole and faces the housing with a gap having a predetermined size; and a gas passage adapted to connect the gap to outside of the housing and allow gas contained in a portion of the gap to pass to the outside of the housing.

Abstract translation: 旋转机构包括：壳体; 通过设置在所述壳体处的孔插入的轴; 安装在壳体上并可旋转地支撑轴的轴承; 旋转构件，其设置在所述轴的一个端部处，适于与所述轴一起旋转，并且具有突出到所述孔的径向外侧并以具有预定尺寸的间隙面向所述壳体的部分; 以及气体通道，其适于将间隙连接到壳体的外部，并允许包含在间隙的一部分中的气体通过到壳体的外部。