Invention Application
- Patent Title: PLASMA PROCESSING APPARATUS
-
Application No.: US15593861Application Date: 2017-05-12
-
Publication No.: US20170338081A1Publication Date: 2017-11-23
- Inventor: Yohei YAMAZAWA
- Applicant: TOKYO ELECTRON LIMITED
- Priority: JP2016-099568 20160518
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A capacitively coupled plasma processing apparatus includes: a chamber body configured to provide a chamber; first and second electrodes installed such that an internal space of the chamber is defined between the first and second electrodes; a high frequency power supply; a matcher for impedance matching connected to the high frequency power supply; a transformer including a primary coil coupled to the high frequency power supply via the matcher, first and second secondary coils; and at least one impedance adjusting circuit having a variable impedance, and installed in at least one of a first serial circuit between the first electrode and a ground connected to the other end of the first secondary coil, and a second serial circuit between the second electrode and a ground connected to the other end of the second secondary coil.
Public/Granted literature
- US10593517B2 Plasma processing apparatus Public/Granted day:2020-03-17
Information query