Invention Application

  • Patent Title: PLASMA PROCESSING APPARATUS
  • Application No.: US15593861
    Application Date: 2017-05-12
  • Publication No.: US20170338081A1
    Publication Date: 2017-11-23
  • Inventor: Yohei YAMAZAWA
  • Applicant: TOKYO ELECTRON LIMITED
  • Priority: JP2016-099568 20160518
  • Main IPC: H01J37/32
  • IPC: H01J37/32
PLASMA PROCESSING APPARATUS
Abstract:
A capacitively coupled plasma processing apparatus includes: a chamber body configured to provide a chamber; first and second electrodes installed such that an internal space of the chamber is defined between the first and second electrodes; a high frequency power supply; a matcher for impedance matching connected to the high frequency power supply; a transformer including a primary coil coupled to the high frequency power supply via the matcher, first and second secondary coils; and at least one impedance adjusting circuit having a variable impedance, and installed in at least one of a first serial circuit between the first electrode and a ground connected to the other end of the first secondary coil, and a second serial circuit between the second electrode and a ground connected to the other end of the second secondary coil.
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