- 专利标题: MODULATION OF APPLIED CURRENT DURING SEALED ROTATIONAL ELECTROPLATING
-
申请号: US15413252申请日: 2017-01-23
-
公开(公告)号: US20170342590A1公开(公告)日: 2017-11-30
- 发明人: Kari Thorkelsson , Jacob Lee Hiester , Yu Ding , Bryan L. Buckalew
- 申请人: Lam Research Corporation
- 主分类号: C25D21/12
- IPC分类号: C25D21/12 ; C25D7/12 ; C25D5/08 ; C25D5/18 ; C25D17/06 ; C25D17/00
摘要:
The embodiments herein relate to methods and apparatus for electroplating one or more materials onto a substrate. Typically, the embodiments herein utilize a channeled plate positioned near the substrate, creating a cross flow manifold between the channeled plate and substrate, and on the sides by a flow confinement ring. A seal may be provided between the bottom surface of a substrate holder and the top surface of an element below the substrate holder (e.g., the flow confinement ring). During plating, the apparatus may switch between a sealed state and an unsealed state, for example by lowering and lifting the substrate and substrate holder as appropriate to engage and disengage the seal. A higher level of applied current or applied voltage may be provided to the substrate when the apparatus is in the sealed state compared to the unsealed state.
信息查询