Invention Application
- Patent Title: SEMICONDUCTOR DEVICE, ELECTRICAL ENERGY MEASUREMENT INSTRUMENT, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
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Application No.: US15479978Application Date: 2017-04-05
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Publication No.: US20170345755A1Publication Date: 2017-11-30
- Inventor: Shinichi UCHIDA , Keiichiro TANAKA , Takafumi KURAMOTO
- Applicant: Renesas Electronics Corporation
- Priority: JP2016-107283 20160530
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L23/552 ; H01L23/532 ; H01L23/528 ; G01R19/00 ; G01R15/18 ; H01L21/3205 ; H01F41/04 ; H01F27/34 ; H01F27/28 ; H01L29/06 ; H01L21/762

Abstract:
According to one embodiment, a semiconductor device 1 includes an Si substrate 11, an inductor 12 formed in wiring layers disposed above the Si substrate 11, and a shield 13 formed so as to surround the inductor 12, in which the shield 13 includes metals 105 to 109 formed in, among the wiring layers, a layer in which the inductor 12 is formed and a layer above that layer, and a silicide 104 formed between the Si substrate 11 and the wiring layers above the Si substrate 11.
Information query
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