SEMICONDUCTOR DEVICE, ELECTRICAL ENERGY MEASUREMENT INSTRUMENT, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Abstract:
According to one embodiment, a semiconductor device 1 includes an Si substrate 11, an inductor 12 formed in wiring layers disposed above the Si substrate 11, and a shield 13 formed so as to surround the inductor 12, in which the shield 13 includes metals 105 to 109 formed in, among the wiring layers, a layer in which the inductor 12 is formed and a layer above that layer, and a silicide 104 formed between the Si substrate 11 and the wiring layers above the Si substrate 11.
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