Invention Application
- Patent Title: FIELD EFFECT TRANSISTOR STRUCTURES USING GERMANIUM NANOWIRES
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Application No.: US15525885Application Date: 2014-12-24
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Publication No.: US20170345896A1Publication Date: 2017-11-30
- Inventor: RASEONG KIM , UYGAR AVCI , IAN YOUNG
- Applicant: INTEL CORPORATION
- International Application: PCT/US2014/072341 WO 20141224
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/775 ; H01L29/66 ; H01L29/423 ; H01L29/16 ; H01L29/786 ; B82Y10/00

Abstract:
Field effect transistor structures are described that are formed using germanium nanowires. In one example, the structure has a germanium nanowire formed on a substrate along a predetermined confinement orientation, a first doped region of the nanowire at a first end of the nanowire to define a source, a second doped region of the nanowire at a second end of the nanowire to define a drain, and a gate dielectric formed over the nanowire between the source and the drain.
Information query
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