Invention Application
- Patent Title: LASER CRYSTALLIZATION APPARATUS AND METHOD OF DRIVING THE SAME
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Application No.: US15442407Application Date: 2017-02-24
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Publication No.: US20180012914A1Publication Date: 2018-01-11
- Inventor: Jong-Oh SEO , Dong-Min LEE , Mee-Jae KANG , Sang-Ho JEON
- Applicant: Samsung Display Co., Ltd
- Priority: KR10-2016-0084706 20160705
- Main IPC: H01L27/12
- IPC: H01L27/12 ; G02B27/09

Abstract:
A laser crystallization apparatus includes a laser generating module configured to generate a laser beam, an optical module configured to guide the laser beam, an annealing chamber comprising a stage on which a target substrate comprising an amorphous thin film formed therein is disposed, the stage being movable along an X-axis direction and a Y-axis direction, and a tilt refractive lens configured to transform the laser beam having a cross-sectional area of a rectangle shape into a tilted laser beam having a cross-sectional area of a non-rectangular parallelogram shape and to irradiate the tilted laser beam perpendicular to the stage.
Public/Granted literature
- US10050067B2 Laser crystallization apparatus and method of driving the same Public/Granted day:2018-08-14
Information query
IPC分类: