Invention Application
- Patent Title: RESISTIVE MEMORY CELL HAVING A COMPACT STRUCTURE
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Application No.: US15694463Application Date: 2017-09-01
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Publication No.: US20180012935A1Publication Date: 2018-01-11
- Inventor: Philippe Boivin , Simon Jeannot
- Applicant: STMicroelectronics (Crolles 2) SAS , STMicroelectronics (Rousset) SAS
- Priority: FR1555732 20150623
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00 ; G11C13/00

Abstract:
The disclosure relates to a memory cell formed in a wafer comprising a semiconductor substrate covered with a first insulating layer, the insulating layer being covered with an active layer made of a semiconductor, the memory cell comprising a selection transistor having a control gate and a first conduction terminal connected to a variable-resistance element, the gate being formed on the active layer and having a lateral flank covered with a second insulating layer, the variable-resistance element being formed by a layer of variable-resistance material, deposited on a lateral flank of the active layer in a first trench formed through the active layer along the lateral flank of the gate, a trench conductor being formed in the first trench against a lateral flank of the layer of variable-resistance material.
Public/Granted literature
- US10283563B2 Resistive memory cell having a compact structure Public/Granted day:2019-05-07
Information query
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