Invention Application
- Patent Title: METHOD FOR PRODUCING NANOIMPRINT TRANSFER BODY
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Application No.: US15646724Application Date: 2017-07-11
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Publication No.: US20180016687A1Publication Date: 2018-01-18
- Inventor: Atsushi MIURA , Yuri SASAKI , Hiroaki WAKAYAMA
- Applicant: KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO
- Applicant Address: JP Nagakute-shi
- Assignee: KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO
- Current Assignee: KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO
- Current Assignee Address: JP Nagakute-shi
- Priority: JP2016-138926 20160713; JP2017-027133 20170216
- Main IPC: C25D1/00
- IPC: C25D1/00 ; C09D183/10 ; C01B33/12 ; G03F7/00

Abstract:
A method for producing a nanoimprint transfer body includes the steps of: forming, on a substrate, a film including a block copolymer capable of microphase separation and an inorganic precursor incorporated in one polymer block component constituting the block copolymer or a polymer phase including the polymer block component; subjecting the block copolymer to microphase separation to form a microphase separated structure including the block copolymer and the inorganic precursor incorporated in the polymer block component or the polymer phase including the polymer block component; removing organic components from the microphase separated structure to form a nanostructure of an inorganic component; and forming a nanoimprint transfer body by using the nanostructure as a master mold.
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